Ion gauges are highly accurate

Published: 2-Apr-2001


BOC Edwards has added a new series of active ion gauges to its range of instrumentation for vacuum measurement and control. AIGX gauges offer high accuracy measurement from 5x10–2 to 5x10–10 torr.

The gauges combine a wide measurement range with very low emissions of charged particles. In comparative tests, AIGX showed up to a 30-fold reduction in emissions compared to leading competitive products, making it applicable to processes where background noise is undesirable.

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