High Precision mass flow controller

Sensirion will be showing a new generation of mass flow controllers (MFC) at Achema. These are for gases and is based on CMOSens technology. The CMOSens PerformanceLine offers striking performance, a fast settling time and attractive cost for OEM applications.

Thanks to the fusion of a thermal sensor element with the readout circuitry on a single semiconductor chip (patented CMOSens technology), the PerformanceLine achieves an accuracy of 0.8% of setpoint respectively 0.1% of full scale. This makes it 10x more precise than any conventional analogue MFC. With a settling time of only 150ms the PerformanceLine is also 10x faster than conventional devices.

Another important customer benefit is the large dynamic range, which means that one single CMOSens MFC covers the measurement range of several traditional mass flow controllers, which can significantly reduce system cost, particularly in OEM applications.

The CMOSens PerformanceLine can operate at input pressures of up to 10 bar (145 psi) and comes in a vacuum tight stainless steel package which is mounted in a rugged aluminium housing. This makes the PerformanceLine the ideal choice for a wide range of applications, such as mass flow controlling for process control (chemical engineering, pharmaceutical processing etc.), medical applications, fuel cells, as well as gas flow metrology.

The PerformanceLine is fully compatible with conventional analogue mass flow controllers. The analogue electrical interface (0-5V) and the supply voltage of +/-15VDC guarantee for an easy-to-use plug and play solution.